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Abstract
The demand for ultra precise positioning of nanometer-order is increasing with the progress of nanotechnology in biotechnology industry and especially semiconductor industry. Previously we developed the elastic hinge guide stage driven by pneumatic bellows for such a demand, and realized ultra precise positioning with accuracy of 0.02±3.9 [nm]. Then, positioning accuracy was limited by the vibration from a floor with the resonance frequency which is decided by the mass of a stage and the spring of elastic hinges. On the other hand, the measurement of exact stage position by the laser interferometer is difficult because fluctuation of air influences to the measurement. In this research, guide was changed into the air bearing from the elastic hinge, and positioning measurement was changed into the laser scale from the laser interferometer in order to solve these problems. The purpose of this research is investigated the positioning accuracy the changed stage. As a result, the positioning accuracy is improved to 0.01 ±0.9 [nm] with the positioning resolution of l [nm] and the good positioning repeatability.
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