Abstract
A surface acoustic wave (SAW) motor is small and low in profile with high speed and large thrust in linear motion. Hence the performance has been evaluated from transient response even though the reliability is rather low. We tried to measure the thrust directly using loading mass. Difficulty of thrust evaluation by loading mass is tiny size of the slider in mm dimensions and huge thrust in several N. Moreover, the moving distance of the SAW motor is short in a few cm. Hence the SAW motor has to be stopped before the mechanical system for the measurement becoming in static condition. The loading mass was connected with steel wires even though the wires were elastic. But we cannot use bulky material for mass connection due to small size. By evaluating the stretch of the steel wire, the speed vs. load was successfully measured. The loading force was estimated from the wire elasticity and the stretching value from the measurement using two sets of laser Doppler velocimeter (LDV). We successfully proved that the actual SAW motor thrust is 60 % larger than that of the estimated value from transient response; 4.0 N against 2.5 N for example.
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