Abstract
Next generation wireless communication will be required to use in high frequency range (3-5 GHz), however semiconductor switch isn't having enough performance in the high frequency range. Radio Frequency-Micro Electro Mechanical Systems (RF-MEMS) switch (small mechanical switch) is recently focused for high performance in the high frequency range. There are problems of durability and adhesion on the contact materials of this device. Carbon nanotube (CNT) film has good wear resistance, very low adhesion and very low electrical resistance which are very useful to RF-MEMS switch. On the other hand, CNT film shows high electrical contact resistance. We attempted synthesis of metal plating on CNT film as reducing method of electrical contact resistance in this study. Fiber structure was observed in composite plating CNT film. Electrical resistance of the composite materials were 520.6Ωm measured by four probe method, and electrical contact resistance was about 3Ω with a load of 5mN by two probe method.
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