Abstract
For in-pipe working micromachines and so on, a compact and high power density microactuator having FI micropump and ER microvalve was developed. The ER microvalve controls an ERF (electro-rheological fluid) flow due to the apparent viscosity increase in electric field. The FI micropump produces high output fluid power using fluid inertia effect in an outlet pipe. First, for pumping higher viscosity fluids such as ERFs, a multi-reed valve was proposed and characterized. Second, based on the results, a small-diameter micropump was successfully developed. Finally, an valve-integrated ER microactuator was fabricated and the validity with the fabricated small-diameter FI micropump was experimentally confirmed.
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