Abstract
Along with the development of micro- and nano-technologies, gas-surface interaction becomes important due to large surface area-to-volume ratio in micro-scale gas flows. In such flows, the Knudsen number (Kn) is often employed as a parameter of rarefaction of flows. When 0.01<Kn≦0.1, a flow is classified as the slip flow with a finite velocity slip at boundary. In this regime, the mass flow rate increases from the rate in the continuum regime because of the velocity slip. The mass flow rate depends on the combination of molecule and surface. In this study, we measured the mass flow rate of water molecules to investigate the characteristics on gas properties. The constant-volume technique was employed for measuring the mass flow rate through a micro channel. The obtained results suggested that the adsorption of water molecules on the measurement system influenced the accurate measurement of the mass flow rate.
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