Abstract
In the present paper, phase-shifted voltage was applied to discrete electrodes of PZT bimorph actuator in order to derive pseudo-wave deformation. The behavior of deformation of the actuator was calculated by the 3-D FEM piezoelectric analysis. In the model dimensions, thickness was 0.7mm and the wavelength of the deformation wave was 30mm. The AC Voltage of 200V amplitude was applied to the parallel-type bimorph actuator. From the calculated results, it appeared that amplitude of the wave deformation along center was maximum and that along the free-edge was minimum. It was also shown that the curvature in the width direction decreased when width increased. From these results, wide-width design was necessary for manufacturing high-performance actuators.
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