Abstract
The discharge current-voltage characteristics of a dc magnetron with a single hot titanium target in Ar + O2 environment are studied. It was found that the I-V characteristics measured in the range of current densities of 10-200 mA/cm2 have three inflection points and a maximum. The competition of several processes can cause the discovered features. In the oxide target operating mode, these processes include the chemical reaction for the formation of oxide on the surface of the target and its sputtering by argon ions. In the metal mode, gas rarefaction near the target and thermionic emission compete.
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