ITO Thin Films prepared by Gas-Timing RF Magnetron Sputtering for Transparent Flexible Antenna

Pakorn Prajuabwan,Supanit Porntheeraphat,Jiti Nukeaw,Annop Klamchuen

doi:10.1109/nems.2007.352101

ITO Thin Films prepared by Gas-Timing RF Magnetron Sputtering for Transparent Flexible Antenna

Pakorn Prajuabwan, Supanit Porntheeraphat + Show 2 more

https://doi.org/10.1109/nems.2007.352101

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Publication Date: Jan 1, 2007

Citations: 6

Affiliation: Mahanakorn University of Technology, National Electronics and Computer Technology Center, King Mongkut's Institute of Technology Ladkrabang, National Nanotechnology Center

#Indium Tin Oxide Thin Film #Indium Tin Oxide + Show 8 more

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Abstract

The transparent flexible plastic antenna was fabricated. Indium tin oxide (ITO) thin film was deposited on flexible plastic substrate at room temperature by radio frequency (RF) magnetron sputtering with a new technique, called gas-timing. By using the X-ray diffraction (XRD) measurement of the ITO thin film grown by this technique, a cubic nanocrystalline structure with predominant (222) orientation was observed. The technique of gas-timing we used, the ITO thin film on flexible substrate was achieved with high transmittance in visible region of 90% and low resistivity. The performance of the new film antenna was studied experimentally with its return loss and radiation patterns.

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