ITO patterning using advanced green and infrared pulsed fiber lasers

Abstract

Laser patterning of Indium Tin Oxide (ITO) deposited on bulk substrates enables a chemical waste free, high throughput process that is widely used in flat panel and touch panel display devices. To attain economic viability and meet the need for narrow touch sensor borders with high quality ITO patterning, the width, uniformity, and throughput of the scribing lines are key quality parameters. In this talk we report on the advances in pulsed nanosecond fiber lasers at wavelengths of 532 and 1064-nm with optimized parameters for meeting theses critical requirements. Specifically, near diffraction-limited beam quality, high peak power capabilities, short pulses, and fast transient response are necessary to produce consistent scribed lines in the order of 10 µm in width with smooth edges. The results of our study demonstrate the advantage of using the IR laser as a robust, cost-effective solution for scribing lines with a width in between 15-25 µm. However, the ability to focus the beam of the green laser more tightly makes it the preferred candidate for meeting the 10 µm width target.Laser patterning of Indium Tin Oxide (ITO) deposited on bulk substrates enables a chemical waste free, high throughput process that is widely used in flat panel and touch panel display devices. To attain economic viability and meet the need for narrow touch sensor borders with high quality ITO patterning, the width, uniformity, and throughput of the scribing lines are key quality parameters. In this talk we report on the advances in pulsed nanosecond fiber lasers at wavelengths of 532 and 1064-nm with optimized parameters for meeting theses critical requirements. Specifically, near diffraction-limited beam quality, high peak power capabilities, short pulses, and fast transient response are necessary to produce consistent scribed lines in the order of 10 µm in width with smooth edges. The results of our study demonstrate the advantage of using the IR laser as a robust, cost-effective solution for scribing lines with a width in between 15-25 µm. However, the ability to focus the beam of the green laser more...