Abstract
There is a trade-off between uniformity and diffraction efficiency in the design of diffractive optical elements. It is caused by the inherent ill-posedness of the design problem itself. For the optimal design, the optimum trade-off needs to be obtained. The trade-off between uniformity and diffraction efficiency in the design of diffractive optical elements is theoretically investigated based on the Tikhonov regularization theory. A novel scheme of an iterative Fourier transform algorithm with regularization to obtain the optimum trade-off is proposed.
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