Abstract
The elemental composition of surfaces is of great importance for the understanding of many surface processes such as catalysis. For a reliable analysis and a comparison of results, the quantification of the measured data is indispensable. Positron annihilation induced Auger Electron Spectroscopy (PAES) is a spectroscopic technique that measures the elemental composition with outstanding surface sensitivity, but up to now, no standardized evaluation procedure for PAES spectra is available. In this paper we present a new approach for the evaluation of PAES spectra of compounds, using the spectra obtained for the pure elements as reference. The measured spectrum is then fitted by a linear combination of the reference spectra by varying their intensities. The comparison of the results of the fitting routine with a calculation of the full parameter range shows an excellent agreement. We present the results of the new analysis method to evaluate the PAES spectra of sub-monolayers of Ni on a Pd substrate.
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