Issues associated with scaling up production of a lab demonstrated MEMS mass sensor

Abstract

This work reports on the development of a lab demonstrated resonant mass sensor towards mid-size production. The issues associated with scaling-up production of the microfabricated chip are discussed with particular focus on yield and device reproducibility, as well as the constraints imposed on the design and manufacturing of the device when packaging and integration must be taken into account. Issues of modal alignment and ambient operational pressure are discussed. Fabricated devices show a 4.81 Hz pg−1 mass sensitivity with a temperature sensitivity of typically 10 Hz °C−1.