Abstract
A tunable surface plasmon resonance (SPR) structure driven by microelectromechanical system (MEMS) is proposed and analyzed in this work. The MEMS isotropically expands the suspended SPR structures of nanometer metal disks scattered on a polydimethylsiloxane (PDMS) diaphragm, to different extents on the xy-plane; filtering the incident white light into various colors under control of applied voltage. This symmetrical MEMS design and its isotropic structure modulation of SPR prevailed other MEMS color filters in modulation capability, operation variety, and shows independency of polarization.
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