Abstract
A symmetric illumination device for scanning tunneling optical microscopy is proposed. This new configuration limits the spurious effects due to non isotropic illumination, coherence and polarization effects. Some specific test objects have been fabricated in order to estimate the validity of such a microscope. Experimental results exhibiting highly confined features for a 15 nm chromium layer with 130–150 nm diameter holes have been obtained.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.