Abstract
We have examined the effects of target mass on sputtered material using 100 keV argon and neon to sputter an elemental target comprising the two naturally occurring isotopes of boron. At low beam fluences (≈ 1 × 10 15ions/cm 2) a light-isotope secondary enhancement is observed relative to steady-state secondary ion yields collected at higher beam fluences. The enhancement (46.1%o for Ne + irradiation and 51.8%o for Ar + irradiation) is large compared to the predictions of analytical theories and is independent of variations in surface potential, chemical effects, and surface impurities. This effect is consistent with an explanation based on an energy and momentum asymmetry in the collision cascade.
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