Abstract
Atomic collision processes can be studied with much better statistics by the use of modern parallel computers. Preferential sputtering of natural molybdenum with seven isotopes as a model target is investigated with the BCA program TRIM.SP. For argon bombardment the dependence of the sputter yield on the incident energy is investigated in the energy range from 50 eV to 20 keV and on the angle of incidence. The influence of the projectile mass is investigated for helium, neon, argon, krypton, xenon, and radon at 100 eV and normal incidence. As a measure for the preferential sputtering the fractionation is determined for the sputtering yield, the sputtered energy, energy and angular distributions of sputtered atoms. The strong influence of primary knock-on atoms on the value of the fractionation is discussed. In addition, the dynamic behaviour of the system is studied with the BCA program TRIDYN.
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