Isothermal stress relaxation in electroplated Cu films. I. Mass transport measurements

Abstract

Recent studies on Cu interconnects have shown that interface diffusion between Cu and the cap layer dominates mass transport for electromigration. The kinetics of mass transport by interface diffusion strongly depends on the material and processing of the cap layer. In this series of two papers, we report in Part I the interface and grain-boundary mass transport measured from isothermal stress relaxation in electroplated Cu thin films with and without a passivation layer and in Part II a kinetic model developed to analyze the stress relaxation based on the coupling of grain boundary and interface diffusion. We show that a set of isothermal stress relaxation experiments together with appropriate modeling analysis can be used to evaluate the kinetics of interface and grain-boundary diffusion that correlate to electromigration reliability of Cu interconnects. Thermal stresses in electroplated Cu films with and without passivation, subjected to thermal cycling and isothermal annealing at selected temperatures, were measured using a bending-beam technique. Thermal cycling experiments showed the effect of passivation and provided information to select the initial stresses and temperatures for isothermal stress measurements. Isothermal experiments at moderate temperatures showed a significant transient behavior of stress relaxation. Based on the kinetic model developed in Part II, grain boundary and interface diffusivities were deduced. While the deduced grain boundary diffusivity reasonably agrees with other studies, the diffusivity at the Cu∕SiN cap layer interface was found to be generally lower than the grain-boundary diffusivity at the temperature range of the present study.