Abstract

A general formula for the capacitance transient response in an MIS structure has been developed, including the continuous density distribution of interface states and discrete multi-impurity levels. A new method of spectroscopic measurement is proposed for determining the density distributions and capture cross-sections of interface states and bulk impurity levels under isothermal conditions. The method is then applied to an n-InAs/anodic oxide MIS diode.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call