Abstract
In a high-density helicon plasma production process, a contribution of Trivelpiece-Gould (TG) wave for surface power deposition is widely accepted. The TG wave can be excited either due to an abrupt density gradient near the plasma edge (surface conversion) or due to linear mode conversion from the helicon wave in a density gradient in the bulk region (bulk mode conversion). By numerically solving the boundary value problem of linear coupling between the helicon and the TG waves in a background with density gradient, we show that the efficiency of the bulk mode conversion strongly depends on the dissipation included in the plasma, and the bulk mode conversion is important when the dissipation is small. Also, by performing FDTD simulation, we show the time evolution of energy flux associated with the helicon and the TG waves.
Highlights
Helicon plasma is a high-density and low-temperature plasma generated by the electromagnetic wave excited in a plasma
Our results provide the first study on the contributions of power depositions and their profiles of the helicon and the TG waves when the collision frequency is assumed to be constant in a plasma column
We have clarified the contribution of the bulk mode conversion and the helicon wave for the power deposition under typical experimental conditions: the efficiency of the bulk mode conversion strongly depends on the collision frequency
Summary
Helicon plasma is a high-density and low-temperature plasma generated by the electromagnetic (helicon) wave excited in a plasma. By evaluating power depositions of the helicon and the TG waves, we confirm the importance of the bulk heating near the MCS by the helicon wave as pointed out by Kim. Our results provide the first study on the contributions of power depositions and their profiles of the helicon and the TG waves when the collision frequency is assumed to be constant in a plasma column. Our results provide the first study on the contributions of power depositions and their profiles of the helicon and the TG waves when the collision frequency is assumed to be constant in a plasma column We believe this understanding leads to the efficient control of the profiles of density and temperature in a helicon plasma production
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