Abstract
Abstract Vinylidene chloride–vinyl chloride copolymer (Saran® copolymer) film was irradiated with ArF and KrF excimer laser light in a vacuum at ambient temperature. The irradiation of ArF and KrF excimer laser light mainly caused the formation of diene and triene structures, respectively. From the dependence on the laser intensity it was concluded that diene and triene were formed via single-photon and multi-photon processes, respectively. The wavelength dependence was explained by photochemical and photothermal effects for the ArF and KrF lasers, respectively.
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