Irradiation behavior and recovery effect of ferroelectric properties of PZT thin films* *Project supported by the National Natural Science Foundation of China (Grant No. 51802056), the Science Foundation of the National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, and the Key Laboratory of Micro-systems and Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, China.

Abstract

Lead zirconate titanate piezoelectric ceramics have important applications in space and aerospace technology, but the effect and physical mechanism of charged particle radiation on their performance yet to be clarified. In this study, we characterized PbZr0.52Ti0.48O3 (PZT) thin films, and changes in the ferroelectric properties of the films before and after electron and proton irradiation were investigated. The natural and heat treatment recoverability of the ferroelectric properties were studied, and the damages and mechanisms of different types of radiation in PZT films were also investigated. The results show that, in addition to ionization damages, electron irradiation causes certain structural damage on the PZT film, and the large structural damage caused by proton irradiation reduces drastically the ferroelectricity of the PZT film.