Abstract
The formation of β-FeSi2 precipitates was observed for the first time in microcrystalline Si films. The Fe-doped amorphous Si films (a-Si:Fe) were obtained using magnetron sputtering. Subsequent short-time thermal treatment led to the transition of amorphous Si to microcrystalline Si and to the formation of β-FeSi2 precipitates. The synthesized samples emitted at a wavelength of λ≈1.54μm at 100K.
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