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Abstract
IR normal transmission and angular reflection spectra are studied for lamellar silicon grating-wafer structures. The grating dimensions are comparable with the radiation wavelengths 2.2–22 μm. The spectra were measured using the FTIR system. Numerical simulations of the spectra were carried out using an operator-vector version of rigorous-coupled wave analysis. The theoretical results are in agreement with the measured spectra. The effect of grating structure on the manifestation of two inherent light absorption mechanisms of bulk silicon-interstitial oxygen vibrations and lattice phonons—is discussed. The results indicate the possibility of obtaining a narrow spectral absorber.
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