Abstract
Multi-pulse and single-pulse infrared laser induced thermolysis of gaseous (chloromethyl)silane, H3SiCH2Cl occurs via 1,1-HCl and H2C: elimination and dehydrogenation and yields nano-structured Si/C/H phases containing most of the Si and C atoms of the precursor. The identification of final volatile products and observation of H2Si:, H2C: and HClSi: transients by LIF spectroscopy suggest that intermediate silene isomers decompose into silylene and carbene. The deposited films are composed of SiC and polycarbosilane and their H content differs depending on the mode of the IR thermolysis.
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