Abstract
The infrared multiphoton decomposition of tetravinylsilane in flow and batch reactors induced by a TEA CO 2 laser leads to the formation of gaseous ethyne (the major product), ethene, buta-1,3-diene and a solid a-SiC:H deposit, the composition of which depends on the reactor used and the temperature of the substrate. Prolonged exposure of the films to air leads to the incorporation of oxygen.
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