Abstract
Electronic applications of porous metal–organic frameworks (MOFs) have recently emerged as an important research area. However, there is still no report on using MOF solid electrolytes in iontronics, which could take advantage of the porous feature of MOFs in the ionic transport. In this article, MXene-derived two-dimensional porphyrinic MOF (MX-MOF) films are demonstrated as an electronic-grade proton-conducting electrolyte. Meanwhile, the MX-MOF film shows high quality, chemical stability, and capability of standard device patterning processes (e.g., dry etching and optical and electron beam lithography). Using the commercialized nanofabrication processes, an electric double-layer (EDL) transistor is demonstrated using the MX-MOF film (derived from V2CTx MXene) as an ionic gate and MoS2 film as a semiconducting channel layer. The EDL transistor, operated by applying an electric field to control the interaction between ions and electrons, is the core device platform in the emerging iontronics field. Therefore, The MX-MOF, confirmed as a solid electrolyte for EDL transistor devices, could have a significant impact on iontronics research and development.
Highlights
Electronic applications of porous metal−organic frameworks (MOFs) have recently emerged as an important research area
V2CTx MXene nanosheets with 2D morphology were confirmed by the scanning electron microscope (SEM) and atomic force microscopy (AFM) images in Figures S1 and S2
We have successfully demonstrated high-quality V2CTx MXene-derived MOF films on various substrates. These films are chemically and mechanically stable enough to go through a cleanroom fabrication process, including lithography (UV-light and electron-beam lithography) and dry etching
Summary
Electronic applications of porous metal−organic frameworks (MOFs) have recently emerged as an important research area. Metal−organic frameworks (MOFs) are an important class of materials[1] that have found a large number of potential applications in their bulk form Such applications include gas separation[2] and storage,[3] catalysis,[4] and chemical and biological sensing.[5,6] Recently, there has been increasing attention on using MOFs in various microelectronic applications.[1,7] So far it has been reported that MOFs can be used as a semiconductor channel[8] or a dielectric layer[9,10] in thin-film transistors, an active layer in memristors,[11] and a photoresist for lithographic patterning.[12] These preliminary studies demonstrated that MOFs have some potential applications in electronics.[13] to date, there is still no report on using MOFs as solid electrolytes in iontronics, which is a recently emerging branch of electronics. ACS Nano www.acsnano.org using standard microelectronic fabrication methods has been very challenging, but a highly desired objective of the MOF community.[1,7] In this article, we demonstrate a feasible and low-cost process to make high-quality proton-conducting MOF films, which can be deposited, patterned, and integrated into electronic devices
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