Abstract

Experiments have been performed in which ion-induced Auger electron yields of Mg, Al and Si were measured as a function of ion energy. A computer simulation based on a binary collision cascade model yielded results that were in close agreement with the experimental findings. From this a model is proposed, where the creation of inner shell vacancies occurs during symmetrical collisions in the collision cascade generated by the ion. From the minimum energy required for Auger emission a distance of closest approach between the particles can be derived, using the Molière approximation of the screened Coulomb potential to describe the collisions. This distance can be correlated with the radii of the interacting orbitals derived from Hartree-Fock-Slater calculations.

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