Abstract
Silica nanofluidic channels with 50 nm height were fabricated on glass substrates. A PDMS microfluidic network was integrated with the nanochannels for fluidic handling. Ionic conductivity measurements were performed across the nanochannels with several KCL concentrations. Ionic conductivity saturation at ∼700 μS cm-1 was observed at low salt concentrations (<10-4 M) due to of the overlap of the electrical double layers of the top and bottom surfaces of the nanochannel.
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