Abstract
Abstract Thin layers (40–90 nm) of molybdenum were implanted with 200 keV arsenic ions in order to obtain molybdenum silicide through ion-beam mixing. The temperature of the samples during implantation was varied between 120 and 510°C. The mixed layers were investigated using SNMS (secondary neutral mass spectroscopy), and a strong dependence of the layer composition on the implantation temperature was found. At low temperatures (120 and 260°C), layers of inhomogeneous composition were formed, in accordance with the results of Monte Carlo simulations (TRIDYN). At an intermediate temperature of 400°C a mixture of MoSi 2 and Mo was found, while at a high temperature (510°C) all intermixed molybdenum was converted into MoSi 2 .
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