Abstract

ABSTRACTWe are studying the boron nitride system by using a pulsed excimer laser to ablate from hexagonal BN (hBN) targets to form cubic BN (cBN) films. We are depositing BN films on heated (400°C) Si (100) surfaces and are using a broad beam ion source operated with Ar and N2source gasses to produce BN films with a high percentage of sp3-bonded cBN. The best films to date show ∼85% sp3-bonded BN as determined from infrared (IR) reflection spectroscopy. High resolution transmission electron microscopy (TEM) and selected area electron diffraction (SAD) confirm the presence of cBN in these samples. The films are polycrystalline and show grain sizes up to 500 Å.

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