Abstract
The condensation of thermal carbon atoms under simultaneous noble gas ion bombardment was investigated as functions of ion energy, angle of ion incidence, ion mass, and ion-to-atom arrival ratio. The effects of the different growth conditions are discussed in terms of changing the ion-atom interaction processes and the effective area of energetically activated carbon matrix with respect to the protective film behaviour. Thus, the intrinsic film stress, the corrosion protection potential and the microhardness of the films were investigated, using the bending-beam method, cyclic voltammetry and dynamic Vickers indentation respectively. Especially at ion angles of about 60° with respect to the target normal, it is possible to obtain very adherent, hard, protective carbon films under bombardment by argon ions of energy 6 keV. Under normal low energy neon ion bombardment, the film hardness behaviour was observed to change abruptly with the ion/atom ratio. The experiments show the strong dependence of the film properties on the ion bombardment parameters and the possibility to control precisely the protection behaviour.
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