Abstract
An ion thinning apparatus for the preparation of transmission electron microscopy (TEM) specimens was constructed using new-type cold cathode ion guns. The gun was specially designed for this purpose and has a movable central cathode rod. The rod is used to stabilize the discharge inside the gun when the pressure is high and to stimulate it when the pressure is low. The gun has no consumable parts within it and operates stably for more than 300 h. The thinning apparatus operates well at a vacuum of 3×10−5 to 1×10−4 Torr and gives argon-ion beams of 5 kV, 0.8 mA, with a maximum density of 0.25 mA/cm2. A few examples of the preparations and the observations are also described for the specimens of some rock-forming minerals and human teeth.
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