Abstract
One of the more important aspects of ion bombardment modification of surface morphology of solids is surface roughness. In spite of a large number of publications concerning the first mentioned surface property (i.e. morphology), information about the influence of ion sputtering on the roughness is rather sparse. Taking into account the importance of the question in various branches of science and technology as well as its potential and practical implications, some experimental results of argon ion beam bombardment induced roughness on titanium, tantalum and stainless steel surfaces are presented in this paper.
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