Abstract
A joint research and development effort focusing on the design of steady state, intense ion sources has been in progress for the past two and a half years. Our ultimate goal is to meet the two, energy extreme range needs of mega‐electron‐volt and 100’s of electron‐volt ion implanters. This endeavor has already resulted in record steady state output currents of higher charge state Antimony and Phosphorous ions: P2+ (8.6 pmA), P3+ (1.9 pmA), and P4+ (0.12 pmA) and 16.2, 7.6, 3.3, and 2.2 pmA of Sb3+ Sb4+, Sb5+, and Sb6+ respectively. For low energy ion implantation our efforts involve molecular ions and a novel plasmaless/gasless deceleration method. To date, 1 emA of positive Decaborane ions were extracted at 10 keV and a somewhat smaller current of negative Decaborane ions were also extracted. Initial results also indicate that a Boron fraction of over 70% was extracted from a Bernas‐Calutron ion source.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
