Abstract
Coefficients of ion induced secondary electron emission (ISEE) γ from thin films of Al 2O 3 and MgO have been measured for argon ions in the energy range between 0–3 keV. Dionne's equation for secondary electron emission, which consists of production and emission terms has been modified to explain the kinetic emission of ISEE. The production term for ion induced secondary electrons has been separately formulated, taking account of the energy loss of primary ions, while the process of emission is considered to remain the same as in SEE. The escape depth λ S and emission probability B were obtained from the SEE data and were used, along the range value of incident ions, to calculate the emission term in ISEE. The modified form of the equation was used to evaluate theoretically expected ISEE yield energy curves. Fairly good correlation is observed in theoretical and experimental curves which supports the validity of the proposed theoretical model.
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