Abstract
Non-focussed ion beams may be employed to investigate the surface profile and volume structure of small solid objects, or periodic surfaces by using the known stopping power of the ions in the solid. The moments of surfaces of random asperity may also be determined. The energy spectra of the scattered or reaction ions are recorded as a function of the angle of the object and detector to the beam, and of the energy of the incident ions. From these results it is possible, in general, to determine the shape parameters using computer codes we have developed. The problems in ambiguity which arise will be discussed, together with typical experimental results. Objects in the range of size from 100 Å to several microns prove most useful.
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