Abstract
AbstractMolecule and particle formation in a capacitively coupled radio‐frequency discharge has been investigated. Formation of molecular ions has been investigated by means of plasma process monitoring employing energydispersive mass spectrometry. Particle growth has been studied by recording the intensity of the transmitted and scattered laser light signal from the particle cloud. An oscillation of the transmitted laser intensity was observed which is caused by periodic formation and expansion of a central void. This behavior can be explained by multigeneration dust cloud formation. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
