Ion Machining of Diamond

Abstract

It is demonstrated that argon-ion beams are effective in drilling holes in diamonds. Truncated conical holes were made with basal diameters as small as ∼0.375 mm and tapering to ∼0.05-mm diameter at the top. Larger holes with diameters at the two surfaces of 1.45 and 2.26 mm were milled through a 1.58-mm-thick diamond. Milling rates of up to 2 μ/min were obtained. The inside surfaces of the holes are essentially polished, with adjacent regions appearing to be damage free. The technique also has the capability of milling holes of arbitrary shape and of finely polishing the inside surfaces.