Abstract

Nanodots have been fabricated on rutile TiO2(110) single crystals using Ar ion beam. Ion beam sputtering creates oxygen vacancies, leading to a 45nm thick Ti rich layer, on the surface. Post-sputtering, rutile TiO2 also exhibits a decrease in the inter planar separation along [110] direction. Additionally, blueshift in the Eg Raman mode, representing the vibrations of oxygen atoms along c-axis, is also observed. Both these results suggest the development of a compressive stress along c-axis upon sputtering. Enhancement in intensity of A1g Raman mode also indicates modification in TiO vibrational influence.

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