Abstract
The beam–solid interaction during high flux heavy-ion implantation has been studied by the in situ detection of photon emission. A spinel of MgO· n(Al 2O 3) with n=2.4 was irradiated with 60 keV Cu − at dose rates of 10, 50 or 100 μA/cm 2 to a dose of 1.5×10 17 ions/cm 2 . Under the implantation, photon emission ranging from 1.4 to 6.2 eV was detected by a time-resolved optical device based on a fast-response CCD (Princeton Instruments: IMAX-512). Emission lines of sputtered Mg, Al and Cu atoms were observed. A comparison of the dose and dose rate dependence of the Cu I line intensity from MgO· n(Al 2O 3) with those obtained for amorphous (a-)SiO 2 substrate revealed the good correlation of Cu I line intensity with nanoparticle formation detected by optical absorbance measurement.
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