Abstract
Energy distributions of secondary ions emitted during either energetic ion bombardment or low-energy electron bombardment have been studied for fluorine and oxygen impurities in fluorinated NiCr and a thin diamond film on a silicon substrate. A close similarity has been found for ion-induced and electron-induced energy distributions of O + from diamond as well as for F + from NiCr. This suggests energetically identical, electron-mediated processes dominate positive ion emission in both cases. From threshold measurements of electron stimulated desorption (ESD) for O + and F +, an Auger decay process emerges as a possible explanation.
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