Abstract
Extensive experience has now been gained with respect to the application of ion implantation for surface modification of metals. Some implanters have been specifically developed to serve in research and development as well as in service implantation work within this field. This paper gives an overview of available ion implanters for surface modification of metals and their different design philosophies. A special magnetic scanning and beam position control has been designed for our high-current implanter, capable of fast and efficient ion implantation of tools and components. Accurate magnetic steering of the ion beam by means of computer control allows high-current ion implantation to be performed on selected areas and patterns in the process chamber. In this way, only the important and relevant areas of the specimens are implanted. Thus, ion beam-induced heating of the specimens is decreased and the total process time is considerably reduced, making ion implantation a less costly commercial treatment for several tools and components. Finally, future trends in equipment and technology have been touched upon.
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