Ion implantation into aluminum and copper by a beam of carbon nanoparticles from regenerative sooting discharges

Abstract

We present a new technique to generate light carbon nanoparticles from regenerative sooting discharges and its use for ion implantation on aluminum and copper surfaces at an energy of 40 keV. Films formed at fluences up to 3 × 10 15 C +/cm 2 for aluminum and 10 16 C +/cm 2 for copper are studied using Raman spectroscopy, X-ray diffraction and atomic force microscopy. Raman spectroscopy reveals the existence of graphite and diamond like structures in all samples. Precipitates of Al 4C 3 of rhombohedral and hexagonal types were found in the nanometer ranges from the X-ray diffraction pattern for aluminum samples and the probable formation of body-centered cubic diamond and hexagonal carbon in copper samples. The average grain sizes of Al 4C 3 were calculated ∼40 nm for Al and ∼35 nm for Cu. Mass spectra from a graphite hollow cathode duoplasmatron ion source are also presented. Atomic force microscopy images of a Cu sample also support the existence of 46 nm structures. Light carbon nanoparticles are readily available from the ion source in which a special carbonaceous environment creates regenerative soot. Support gas Ar produces more C 3 than Ne.