Abstract
We demonstrate the low temperature epitaxial alignment of SrTiO 3 thin films prepared by the method of metallo-organic decomposition (MOD) and spin-coated onto single crystalline oxide substrates. Recently we reported the epitaxial alignment of SrTiO 3 films prepared by MOD and heat treated at 1180°C. The very high annealing temperature is required because the MOD films usually turn polycrystalline upon a preliminary heat treatment (pyrolysis) at 450–650°C, necessary to remove the organics and form the inorganic compound. We have been able to reduce significantly the annealing temperature required to align the film epitaxially by incorporation of an intermediate implantation step (Pb, 700 keV, 1.5×10 15 ions/cm 2, liquid nitrogen temperature) between the initial pyrolysis and the final heat treatment. The implantation renders amorphous the MOD film and part of the underlying substrate. Subsequent heat treatment at temperatures as low as 400°C induces the solid phase epitaxial crystallization of the films.
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