Ion implantation and energy loss effect during high-voltage pulsed glow discharge in a tube

Abstract

Plasma parameters of high-voltage pulsed glow discharge in a tube were studied using a static probe and optical emission spectrometry. Experiment results show that two kinds of plasma can be obtained in the tube and a virtual anode can be formed at the center of the tube. The potential of the virtual anode is about 20%–30% of the applied bias. The Auger electron spectroscopy depth profile shows that the peak depth of the implanted ions in the tube is about 70%–80% of that outside the tube, owing to the virtual anode.