Abstract
Ion-excited Auger electron emission was studied for light elemental solids such as Mg, A1 and Si. The spectra of Auger electrons were measured with high energy resolution and high sensitivity. The line width of the atomic-like peak was measured precisely. In addition, angular distributions of ejected Auger electrons were investigated for the first time. These results indicate that the P a, peak corresponds to the Auger electrons emitted from the sputtered atoms, while the p b, peak corresponds to the Auger electrons generated in the solid.
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