Ion energy distribution functions in a supersonic plasma jet

Abstract

Starting from experimental measurements of ion energy distribution functions (IEDFs) in a low pressure supersonic plasma jet, we propose a model to simulate them numerically from first principles calculations. Experimentally we acquired IEDFs with a quadrupole mass spectrometer (QMS) collecting the argon ions produced from a inductively coupled plasma (ICP) and driven into a supersonic free gas expansion. From the discussion of these results and the physics of our system we developed a simulation code. Integrating the equations of motion the code evolves the trajectory of a single ion across the jet. Ar+- Ar collisions are modelled with a 12-4 Lennard-Jones potential which considers induced dipole interactions. IEDFs were simulated at different positions along the jet and compared with the experimental data showing good agreement. We have also implemented a charge transfer mechanism in which the ion releases its charge to a neutral atom which can take place at sufficiently close distances and is a function of the impact energy.