Ion-dust streaming instability in processing plasmas

Abstract

An ion-dust streaming instability is investigated for conditions representative of plasma sheath interface regions where dust grains are observed to be present in processing plasmas. Kinetic theory is used, and the effects of collisions of charged particles with neutrals is retained. It is found that an instability with growth rate of the order of the dust plasma frequency may be driven by the drift of ions relative to charged dust. Possible implication for plasma etching is briefly discussed.