Abstract
When electrons strike certain adsorbed gases, positive ions, neutrals, and/or excited neutrals are released. This electron impact desorption (E.I.D.) effect can cause significant errors in total pressure measurement with hot-cathode gauges and can change the striking characteristics of magnetic, cold-cathode gauges. In certain mass spectrometers, “surface ion” peaks appear in the mass spectrum resulting from E.I.D. of gases sorbed at the ion source electrodes. The general characteristics of E.I.D. and the results of measurements of E.I.D. from metal surfaces are briefly reviewed. The effects of E.I.D. on the characteristics of hot- and cold-cathode gauges and mass spectrometers are considered in some detail. Methods of minimizing errors caused by E.I.D. are discussed.
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