Ion currents to cylindrical Langmuir probes in RF plasmas

Abstract

The positive ion current collected by cylindrical Langmuir probes has been measured in an RF argon plasma. The current-voltage characteristics were measured using an RF compensation technique whereby the probe was forced to follow the RF fluctuation in the local plasma potential. The I-V curves from probes of different radii and material show an ion current which is always greater than that predicted by the orbital motion theory and that agrees well with the radial motion theory. This is because the ions travel to the probe from a distance which is limited by the vessel geometry or by the collisional mean free path. The role of the possible collisions, ion-ion and ion-neutral, in the ion trajectories is analysed. It is suggested that the criterion for the application of the orbital motion theory should be tested whenever this theory is used for the determination of the charged particle density.